3.00 Credits
This course overviews basic material properties as well as environment, health, and safety(EHS) issues in equipment operation and materials handling in "top down" and "bottom up" nanofabrication. The chemical and physical materials properties underlying nanotechnology are surveyed. EHS topics arising from the processing and disposal of these materials are addressed including: cleanroom operation, OSHA lab standard safety training, health issues, biosafety levels(BSL) guidelines, and environmental concerns. Specific safety issues dealing with nanofabrication equipment, materials, and processing will also be discussed including those pertinent to wet benches, thermal processing tools, plasma based equipment, optical, e-beam, stamping and embossing lithography tools, vacuum systems and pumps, gas delivery systems and toxic substance handling and detection.
Prerequisite:
Take NSC-200; Minimum grade D. (Required, Previous). | Take MAT-165 MAT-180 MAT-220 MAT-221 or MAT-222; Minimum grade D. (Required, Previous). | Take MAT-210; Minimum grade D. (Required, Previous). | Take COM-141; Minimum grade D. (Required, Previous). |