NMT 215 - Materials Modification in Nanofabrication

Institution:

Luzerne County Community College

Subject:

Nanofabrication Manufacturing Tech - Science Track

Description:

In this course the student will learn about the manufacturing issues involved in metal interconnects, dielectrics and final device assembly. Aluminum, refractory metals and copper deposition techniques and characterization will be discussed in detail along with topics such as diffusion barriers, contact resistance, electromigration, corrosion, and adhesion. The importance of planarization techniques such as deposition/etchback and chemical/mechanical polishing will be emphasized. Lastly, packaging procedures such as die separation, inspection bonding, sealing and final test will be examined.Prerequisites: CHE 151, GET 251 or GET 252.

Credits:

2.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.luzerne.edu

Phone Number:

(570) 740-0200

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

The Course Profile information is provided and updated by third parties including the respective institutions. While the institutions are able to update their information at any time, the information is not independently validated, and no party associated with this website can accept responsibility for its accuracy.