3.00 Credits
2-2-3 This course will explore in detail the process steps used in modifying material properties nanofabrication. Included will be growth and annealing processes utilizing horizontal and vertical furnaces as well as rapid thermal annealing. The impact of thermal processing on defects, impurities and overall electrical, mechanical, optical and chemical properties will be studied. The student will grow and measure gate and field oxides, implant and activate source and drain regions, and evaluate thermal budget requirements, using state-of-the-art tools. Ion implant- ation, diffusion and surface preparation and treatment will also be covered. Prereqs: ENGR 210. Pre/Coreqs: ENGR 211, ENGR 212, ENGR 213, ENGR 214. Coreq: ENGR 216.
Prerequisite:
Pre/Coreqs: ENGR 211, ENGR 212, ENGR 213, ENGR 214. Coreq: ENGR 216.