MFT 214 - Lithography for Nanofabrication

Institution:

Community College of Allegheny County

Subject:

Manufacturing Technology

Description:

This course covers all aspects of lithography from design and mask fabrication to pattern transfer and inspection. The course is divided into three major sections. The first section describes the lithographic process from substrate preparation to exposure. Students learn the nature and behavior of photoresist materials. The second section examines the process from development through inspection, introducing optical masks, aligners, steppers and scanners. In addition, critical dimension control and profile control of photoresists is investigated. The last section covers advanced optical lithographic techniques such as phase shifting masks and illumination schemes, e-beams, x-ray, extreme ultraviolet (EUV) and ion beam lithography.

Credits:

3.00

Credit Hours:

Prerequisites:

MFT 211, MFT 212 

Corequisites:

MFT 213 

Exclusions:

Level:

Instructional Type:

Lecture/Lab

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.ccac.edu

Phone Number:

(412) 323-2323

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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