TEL 260 - Materials, Safety, Health Issues and Equipment

Institution:

Delaware County Community College

Subject:

Electronics Technology

Description:

This course provides an overview of basic nanofabrication processing equipment and material chemistry and handling procedures. The focus is on cleanroom protocol, safety, environmental and health issues in equipment operation and materials handling. Safety and health issues will be covered for the following topics: cleanroom operation; vacuum pump systems operation; furnace operation; chemical vapor deposition system operation; and vacuum deposition/etching system operation. Specific materials handling issues will include deionization water, solvents, cleaners, ion implantation sources, diffusion sources, photoresists, developers, metals, dielectrics, and toxic, flammable, corrosive, and high purity gases as well as packaging materials. Upon successful completion of this course, students should be able to: Identify the basic nanofabrication processing equipment; Describe the uses and applications of the basic nanofabrication processing equipment; Identify safety hazards associated with nanofabrication; Explain the fundamentals of vacuum technology including pumps, components, and metrology; Identify materials used in nanofabrication manufacturing; Operate material metrology equipment; Associate the material handling issues with each identified nanofabrication material; Explain basic chemical properties of materials; Summarize basic cleanroom operation and protocol; Demonstrate an understanding of basic cleanroom operation and protocol.

Credits:

3.00

Credit Hours:

Prerequisites:

TEL 111, TEL 121, TEL 210, TEL 261*, MAT 210, and ENG 112 (*Course(s) May Be Taken Concurrently)

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.dccc.edu

Phone Number:

(610) 359-5000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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