MPT 213 - Materials In Nanotechnology

Institution:
Westmoreland County Community College
Subject:
Manufacturing Technology
Description:
This course will cover thin film deposition and etching practices in nanofabrication. The deposition techniques to be included in the first part of the course will include atmospheric, low pressure, and plasma enhanced chemical vapor deposition and sputtering; thermal evaporation; and beam evaporation physical vapor deposition. Materials to be considered will include dialectics (nitride, oxide), polysilicon (doped and undoped) metals (aluminum, tungsten, copper), adhesion promoters and diffusion barriers. The second part of the course will focus on etching processes and will emphasize reactive ion etching (single wafer, batch), high-ion-density reactors, ion beam etching and wet chemical etching. Student will receive hands-on experience in depositing and etching dielectric, semiconductor and metal materials using state-of-the-art tools and practicing many of the steps critical to nanofabrication of semiconductor devices including microelectronic, MEMs devices, display structures and structures used in the biotechnology fields.
Credits:
3.00
Credit Hours:
Prerequisites:
Corequisites:
Exclusions:
Level:
Instructional Type:
Lecture
Notes:
Additional Information:
Historical Version(s):
Institution Website:
Phone Number:
(724) 925-4000
Regional Accreditation:
Middle States Association of Colleges and Schools
Calendar System:
Semester

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