PHYS 422 - Basic Nanofabrication Processes - NMT 312

Institution:

Slippery Rock University of Pennsylvania

Subject:

Physics

Description:

The course provides an overview of basic processing steps used in all applications of nanofabrication. Both top-down and bottom-up nanofabrication are included. The majority of the course details a step-by-step description of the equipment and processes needed to fabricate devices and structures such as bio- chips, CMOS transistors, power devices, microelectromechanical (MEM) devices, and opto-electronic structures. Students learn the similarities and differences in both the equipment and process flows needed in fabricating all of these various structures.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Other

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.sru.edu

Phone Number:

(724) 738-9000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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