ENGR 215 - Materials Mod in Nanofab

Institution:

Community College of Philadelphia

Subject:

Engineering

Description:

This course will explore in detail the process steps used in modifying material properties nanofabrication. Included will be growth and annealing processes utilizing horizontal and vertical furnaces as well as rapid thermal annealing. The impact of thermal processing on defects, impurities and overall electrical, mechanical, optical and chemical properties will be studied. The student will grow and measure gate and field oxides, implant and activate source and drain regions, and evaluate thermal budget requirements, using state-of-the-art tools. Ion implant- ation, diffusion and surface preparation and treatment will also be covered.

Credits:

3.00

Credit Hours:

Prerequisites:

ENGR 211 (Prerequisite or Corequisite), ENGR 212 (Prerequisite or Corequisite), ENGR 213 (Prerequisite or Corequisite), and ENGR 214 (Prerequisite or Corequisite)

Corequisites:

ENGR 216

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

2-2-3

Additional Information:

Historical Version(s):

Institution Website:

www.ccp.edu

Phone Number:

(215) 751-8000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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