NFAB 216 - Characterization,Packaging,and Testing of Nanofabricated Structures

Institution:

Harrisburg Area Community College-Harrisburg

Subject:

Nanofabrication

Description:

Techniques and measurements essential for controlling device fabrication and final packaging. Monitoring techniques such as residual gas analysis (RGA), optical emission spectroscopy (OES) and end-point detection are discussed. Characterization techniques such as scanning electron microscopy (SEM), x-ray photoelectron spectroscopy (XPS)/Auger, surface profilometry, advanced optical microscopy, optical thin film measurements, ellipsometry, and resistivity/conductivity measurements are used on real samples. Basic electrical measurements on device structures for yield analysis and process control are also stressed. These include breakdown measurements, junction testing, and simple transistor characterization. In addition, students examine mechanical as well as electrical characteristics of some simple MEMs devices, and chemical and biological responses of nanofabricated biomedical structures. Students also learn about the manufacturing topics involved in subjects such as interconnects, isolation, and final device assembly. Aluminum, refractory metals and copper deposition techniques and characterization are discussed in detail along with topics such as diffusion barriers, contact resistance, electromigration, corrosion, stress effects, and adhesion. The importance of planarization techniques such as deposition/etchback and chemical/mechanical polishing are emphasized. Packaging procedures such as die separation, inspection bonding, sealing and final testing for both conventional integrated circuits and novel MEM and biomedical devices are examined. Prerequisite: Restricted, see program coordinator.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Multiple

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.hacc.edu

Phone Number:

(717) 780-2300

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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