MPT 211 - Material, Safety and Equipment Overview for Nanotechnology

Institution:

Westmoreland County Community College

Subject:

Manufacturing Technology

Description:

This course will provide an overview of basic nanofabrication processing equipment and materials handling procedures. The focus is on procedural, safety, environment and health issues in equipment operation and materials handling. Topics to be covered will include cleanroom operation, safety and health issues; vacuum pump systems operation, environmental safety, and health issues (covering direct drive mechanical, roots blowers, turbonmolecular, and dry mechanical systems); furnace operation, safety, environmental and health issues (covering horizontal, vertical, rapid thermal annealing tools); chemical vapor deposition system operation, safety, environmental and health issues (covering gas delivery, corrosive and flammable gas storage and plumbing, regulators, and mass flow controls); and vacuum deposition/etching system operation, safety, environment and health issues covering microwave and RF power supplies and tuners, heating and cooling units, vacuum gauges, valves and process controllers. Specific materials handling issues will include DI water, solvents, cleansers, ion implantation sources, diffusion sources, photoresists, developers, metals, dielectrics, and toxic, flammable, corrosive and high purity gases as well as packaging materials

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.westmoreland.edu

Phone Number:

(724) 925-4000

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

The Course Profile information is provided and updated by third parties including the respective institutions. While the institutions are able to update their information at any time, the information is not independently validated, and no party associated with this website can accept responsibility for its accuracy.