SMT 211 - Mat Safety and Equip Overview

Institution:
Lehigh Carbon Community College
Subject:
Nanofabrication
Description:
Provides an overview of basic Nanofabrication processing equipment and materials handling procedures. The focus is on procedural, safery, environment, and health issues in equipment operation and materials handling. Topics to be covered will include: cleanrooms operations, safety, and health issues; vacuum pump systems operation,environmental, safety, and health issues (covering direct drive mechanical roots blowers, turbomolecular, and dry mechanical systems); furnace operation, safety, environmental, and health issues (covering horizontal, vertical, rapid thermal annealing tools); chemical vapor deposition system operation, safety, environmental, and health issues (covering gas delivery, corrosive and flammabel gas storage and plumbing, regulators, and mass flow controllers); and vacuum deposition/ethching system operation, safety, environmental, and health issues (covering microwave and RF power supplies and tuners, heating and cooling units, vacuum gauges, valves, and process controllers). Specific materials handling issues will include DI water, solvens, cleansers, ion implantation sources, diffusion sources, photoresists, developers, metals, dielectrics, and toxic, flammable, corrosive, and high purity gases as well as packaging materials.
Credits:
3.00
Credit Hours:
Prerequisites:
Corequisites:
Exclusions:
Level:
Instructional Type:
Lecture
Notes:
Additional Information:
Historical Version(s):
Institution Website:
Phone Number:
(610) 799-2121
Regional Accreditation:
Middle States Association of Colleges and Schools
Calendar System:
Semester

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