NMT 212 - Basic Nanofabrication Processes

Institution:

Luzerne County Community College

Subject:

Nanofabrication Manufacturing Tech - Science Track

Description:

This course will cover in detail the thermal processing necessary for semicon­ductor fabrication. Growth and annealing processes, which utilize horizontal and vertical furnaces, will be examined as well as rapid thermal annealing. This course will cover single crystal growth (Czochralski, float-zone) as well as wafer slicing, etching, polishing, epitaxial growth, and substrate (bulk or epi) specifications. The course will address the impact of thermal processing and thermal processing history on defects, gettering, impurities and overall device properties. The student will grow and measure gate and field oxides, implant and activate source anti­drain regions, and evaluate thermal budget requirements using state-of-the-art tools. Prerequisites: CHE 151, GET 251 or GET 252.

Credits:

2.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.luzerne.edu

Phone Number:

(570) 740-0200

Regional Accreditation:

Middle States Association of Colleges and Schools

Calendar System:

Semester

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